发明名称 |
METHOD FOR FORMING ZINC-DOPED TIN OXIDE THIN FILM |
摘要 |
Provided is a method for forming a zinc-doped tin oxide thin film. The method for forming the thin film comprises the steps of: preparing a source solution containing tin and zinc; and providing the source solution onto a substrate to form a base layer containing a zinc-doped tin oxide, wherein the zinc content in the base layer is lower than that in the source solution. |
申请公布号 |
WO2016137233(A1) |
申请公布日期 |
2016.09.01 |
申请号 |
WO2016KR01819 |
申请日期 |
2016.02.24 |
申请人 |
IUCF-HYU(INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY) |
发明人 |
PARK, Jinseong;BAE, Jaeyoon |
分类号 |
H01L21/208 |
主分类号 |
H01L21/208 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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