发明名称 METHOD FOR FORMING ZINC-DOPED TIN OXIDE THIN FILM
摘要 Provided is a method for forming a zinc-doped tin oxide thin film. The method for forming the thin film comprises the steps of: preparing a source solution containing tin and zinc; and providing the source solution onto a substrate to form a base layer containing a zinc-doped tin oxide, wherein the zinc content in the base layer is lower than that in the source solution.
申请公布号 WO2016137233(A1) 申请公布日期 2016.09.01
申请号 WO2016KR01819 申请日期 2016.02.24
申请人 IUCF-HYU(INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY) 发明人 PARK, Jinseong;BAE, Jaeyoon
分类号 H01L21/208 主分类号 H01L21/208
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