| 摘要 |
A method and an inspection system, the inspection system includes a camera comprising multiple pixels having a pixel width; a mechanical stage, for introducing a movement between an inspected object and optics of the inspection system; wherein the inspected object is expected to move a distance that substantially equals the pixel width during a pixel movement period; an illumination module and optics for illuminating inspected portions of the inspected object and for directing light from the inspected portions to the camera; and wherein the camera is arranged to acquire multiple acquired images of the inspected portions during each pixel movement period, wherein at least two acquired images partially overlap. |
