Pre-ionizer for pulsed gas-discharge laser

摘要

In a CO₂ laser a pre-ionizer is assembled in a flange configured to be attached to a laser-gas enclosure of the laser over an aperture in a wall of the enclosure. An aperture in the base of the flange is aligned over the aperture in the enclosure wall. The aperture in the pre-ionizer flange is covered by a ceramic membrane. A disc electrode is in contact with the ceramic membrane on a side of the membrane outside of the laser-gas enclosure. An RF potential applied to the disc electrode creates a corona discharge on the side of the ceramic membrane inside the enclosure. The corona discharge ionizes laser gas in the enclosure before RF power is applied to electrodes of the slab laser.