| 摘要 |
PROBLEM TO BE SOLVED: To prevent contamination in dispensation by performing a wash of a dispensing nozzle by using a detergent without lowering treatment speed. SOLUTION: This nozzle washer is equipped with a wash tank 61 disposed on a movement route of a dispensing nozzle. A detergent supply port 63 is formed in a side wall of the wash tank 61, and constitutes, together with a detergent supply pipe 617, a first flow path P1 with a detergent liquid flowing therethrough. Further, a water supply port 65 is formed in the side wall of the wash tank 61, and constitutes, together with a water supply pipe 627, a second flow path P2 with a wash water flowing therethrough. Furthermore, a discharge port 67 is formed in a bottom surface of the wash tank 61, and constitutes, together with an internal space of the wash tank 61 and a discharge pipe 637, a third flow path P3 with the detergent liquid having flowed through the flow path P1 and the wash water having flowed through the flow path P2 flowing therethrough. The dispensing nozzle 301, being fixed/disposed at a washing position in the flow path P3, is washed with the detergent liquid and the wash water. COPYRIGHT: (C)2008,JPO&INPIT |
