| 摘要 |
The present invention provides a filter structure manufacturable through fewer steps and at lower cost by using inexpensive materials and general techniques for processing while maintaining accuracy of the production of clearances that determines filtering performance and a method of manufacturing the filter structure. The filter structure according to the present invention comprises a base plate, a first intermediate layer, a second intermediate layer and a cover. The first intermediate layer has a first flow channel and a second flow channel with predetermined widths and depths, and the second intermediate layer has a third flow channel with a predetermined width and depth. The third flow channel communicates with the first flow channel and also with the second flow channel, and the maximum depth of the third flow channel is smaller than the minimum depths of the first flow channel and the second flow channel. Accordingly, the production accuracy for the clearances which determines the filter performance can be highly maintained by utilizing the thickness of the second intermediate layer.
|
