发明名称 DISCHARGE LAMP, CABLE FOR CONNECTION, LIGHT SOURCE DEVICE, AND EXPOSURE DEVICE
摘要 A light source device having a large cooling action on the ferrule member of a discharge lamp. The light source device comprises the discharge lamp having a glass tube (25) in which an electrode for discharging is contained and a ferrule part (28) connected to the glass tube (25), and a connection cable (72). The ring-like member (74A) of the connection cable (72) is connected to the ferrule part (28) of the discharge lamp. A cool air blow passage (74Ac) is formed in the ring member (74A). An electric power is supplied from a power supply (32) to the ferrule part (28) through the power cable (33D) of the connection cable (72) and the ring-like member (74A). Cool air is supplied from an air blower (34) to the ferrule part (28) through the air blow pipe (35D) of the connection cable (72) and the ring-like member (74A).
申请公布号 KR20100014216(A) 申请公布日期 2010.02.10
申请号 KR20097000773 申请日期 2008.04.03
申请人 NIKON CORPORATION 发明人 KIKUCHI TAKAYUKI
分类号 H01J61/52;F21V29/00;F21Y101/00;H01J5/50 主分类号 H01J61/52
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