发明名称 |
HIGH ORDER FOCUS IN LASER RADAR TOOLING BALL MEASUREMENTS |
摘要 |
Interrogation optical beams are focused or otherwise shaped for delivery to a target that includes one or more tooling balls so as to have a beam radius of curvature corresponding to a tooling ball radius. Focus values can be stored in a look-up table and can include two beam focus conditions that produce a selected beam focus. The two beam focus conditions are associated with a common beam curvature. The focus conditions are associated with beam curvatures within and without a Rayleigh range from a beam waist. |
申请公布号 |
US2016246063(A1) |
申请公布日期 |
2016.08.25 |
申请号 |
US201615048963 |
申请日期 |
2016.02.19 |
申请人 |
Nikon Corporation |
发明人 |
Smith Daniel Gene |
分类号 |
G02B27/09;G02B5/122;G01C3/08 |
主分类号 |
G02B27/09 |
代理机构 |
|
代理人 |
|
主权项 |
1. A method, comprising:
directing an interrogation optical beam to a target; and adjusting the interrogation optical beam based on a target feature so that a radius of curvature of the interrogation optical beam at a target surface corresponds to a target feature radius of curvature. |
地址 |
Tokyo JP |