发明名称 HIGH ORDER FOCUS IN LASER RADAR TOOLING BALL MEASUREMENTS
摘要 Interrogation optical beams are focused or otherwise shaped for delivery to a target that includes one or more tooling balls so as to have a beam radius of curvature corresponding to a tooling ball radius. Focus values can be stored in a look-up table and can include two beam focus conditions that produce a selected beam focus. The two beam focus conditions are associated with a common beam curvature. The focus conditions are associated with beam curvatures within and without a Rayleigh range from a beam waist.
申请公布号 US2016246063(A1) 申请公布日期 2016.08.25
申请号 US201615048963 申请日期 2016.02.19
申请人 Nikon Corporation 发明人 Smith Daniel Gene
分类号 G02B27/09;G02B5/122;G01C3/08 主分类号 G02B27/09
代理机构 代理人
主权项 1. A method, comprising: directing an interrogation optical beam to a target; and adjusting the interrogation optical beam based on a target feature so that a radius of curvature of the interrogation optical beam at a target surface corresponds to a target feature radius of curvature.
地址 Tokyo JP