Apparatus For Improving Temperature Uniformity Of A Workpiece

摘要

An apparatus for improving the temperature uniformity of a workpiece during processing is disclosed. The apparatus includes a platen having a separately controlled edge heater capable to independently heating the outer edge of the platen. In this way, additional heat may be supplied near the outer edge of the platen, helping to maintain a constant temperature across the entirety of the platen. This edge heater may be disposed on an outer surface of the platen, or may, in certain embodiments, be embedded in the platen. In certain embodiments, the edge heater and the primary heating element are disposed in two different planes, where the edge heater is disposed closer to the top surface of the platen than the primary heating element.

主权项

1. A workpiece holding and heating apparatus, comprising:
a platen, wherein the platen comprises a top surface, a bottom surface, and a sidewall extending between the top surface and the bottom surface; a primary heating element disposed in a first plane; and an edge heater disposed in a second plane, where the second plane is closer to the top surface than the first plane.