MULTI-ZONE REACTOR, SYSTEM INCLUDING THE REACTOR, AND METHOD OF USING THE SAME

摘要

Multi-zone reactors, systems including a multi-zone reactor, and methods of using the systems and reactors are disclosed. Exemplary multi-zone reactors include a movable susceptor assembly and a moveable plate. The movable susceptor assembly and movable plate can move vertically between reaction zones of a reactor to expose a substrate to multiple processes or reactants.

主权项

1. A multi-zone gas-phase reactor comprising:
a plurality of vertically-stacked reaction zones, wherein each reaction zone comprises one or more of a gas inlet and an exhaust outlet; a movable plate comprising a bottom surface; and a movable susceptor assembly having a top surface, wherein a movable processing region comprises the bottom surface, the top surface and one or more reaction zones.