发明名称 An Undulator
摘要 Apparatus and associated methods for determining a magnetic field strength of an undulator module are disclosed. One such apparatus comprises an undulator module and a magnetic field sensor. The magnetic field sensor comprises a body and a sensing element operable to measure a magnetic field. The undulator module comprises a support structure and a plurality of periodic magnetic structures. The periodic structures are supported by the support structure and being arranged around and extending parallel to a central axis. The undulator module is provided with at least one opening for receiving the sensing element of the magnetic field sensor. The undulator module and the magnetic field sensor comprise complementary alignment features that provide releasable engagement between the magnetic field sensor and the undulator module such that the sensing element of the magnetic field sensor can be repeatably positioned within the undulator module in substantially the same position relative to the central axis undulator module.
申请公布号 NL2015805(A) 申请公布日期 2016.09.29
申请号 NL20152015805 申请日期 2015.11.18
申请人 ASML NETHERLANDS B.V. 发明人 ANDREY ALEXANDROVICH NIKIPELOV;VADIM YEVGENYEVICH BANINE;ERIK ROELOF LOOPSTRA;ALPHONSUS MICHAËL KELGTERMANS
分类号 G03F7/20;H01S3/09 主分类号 G03F7/20
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