SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

摘要

A technique to prevent reduction in throughput of a substrate processing apparatus. On the occurrence of an event disabling execution of a recipe by a processing unit, a different recipe executed by this processing unit may be used depending on the type of event having occurred. The type of event to occur and a substitute recipe that can take the place of a recipe being executed are associated in advance. On the occurrence of abnormality, it is determined whether or not a recipe being executed can be substituted by a different recipe. If the recipe can be substituted, it is determined whether or not the substitute recipe is contained in an unfinished job. If these conditions are satisfied, a substrate processing schedule is changed to execute the substitute recipe in this processing unit. If these conditions are not satisfied, substrate process in this processing unit is stopped.

主权项

1. A substrate processing method implemented in a substrate processing apparatus including a substrate processing unit for substrate process, the substrate processing method comprising:
a recipe identifying step of identifying a recipe for substrate process on a substrate; a schedule setting step of setting a substrate processing schedule based on said recipe, said substrate processing schedule including substrate process by said substrate processing unit; a detecting step of detecting the status of said substrate processing unit; a substitution necessity determining step of determining the necessity of substituting said recipe by a different recipe based on the status of said substrate processing unit detected as a result of said detecting step and said recipe; a schedule resetting step of substituting said recipe by a different recipe and resetting said substrate processing schedule based on the substituted recipe if substituting said recipe by a different recipe is determined to be necessary; and a substrate processing step of performing substrate process on said substrate according to the reset substrate processing schedule.