CHARGED PARTICLE BEAM DEVICE, IMAGE GENERATION METHOD, OBSERVATION SYSTEM

摘要

Provided is a charged particle beam device capable of observing the interior and the surface of a sample in a simple manner. This charged particle beam device operates in a transmitted charged particle image mode and a secondary charged particle image mode. In the transmitted charged particle image mode, a transmitted charged particle image is produced on the basis of a detection signal (512) associated with light emitted from a light-emitting member (500) that emits light upon being irradiated with transmitted charged particles transmitted through the interior of a sample (6). In the secondary charged particle image mode, a secondary charged particle image is produced on the basis of a detection signal (518) caused by reflected charged particles or secondary charged particles (517) from the sample (6).

主权项

1. A charged particle beam device comprising:
a charged particle optical barrel adapted to irradiate a sample with a primary charged particle beam; a sample stage adapted to allow a light-emitting member or a sample table including the light-emitting member to be attachably/detachably arranged, the light-emitting member emitting light by being irradiated with a transmitted charged particle having been transmitted through an interior of the sample; a detector adapted to detect a signal from the sample; and a control unit adapted to control the detector in a transmitted charged particle image mode to generate a transmitted charged particle image based on a detection signal of light from the light-emitting member, and in a secondary charged particle image mode to generate a secondary charged particle image based on a detection signal caused by a secondary charged particle or a reflection charged particle from the sample.