| 发明名称 |
Transmission Electron Microscopy Supports and Methods of Making |
| 摘要 |
A method of making a Transmission Electron Microscopy support comprising depositing a sacrificial layer to the top side of a lacey or holey carbon structure or support or wire mesh, depositing an Atomic Layer Deposition layer to the bottom side of the sacrificial layer, removing the sacrificial layer, forming a Transmission Electron Microscopy support. The Transmission Electron Microscopy support comprises an Atomic Layer Deposition layer which is carbon-less, thin, flexible, can be thermally cleaned, can be plasma cleaned, and contains chemical functionalities to immobilize particles. |
| 申请公布号 |
US2016329187(A1) |
申请公布日期 |
2016.11.10 |
| 申请号 |
US201615073296 |
申请日期 |
2016.03.17 |
| 申请人 |
The Government of the United States of America, as represented by the Secretary of the Navy |
发明人 |
Kidwell David A. |
| 分类号 |
H01J37/26;C23C16/40;C23C16/01 |
主分类号 |
H01J37/26 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of making a Transmission Electron Microscopy support, comprising:
depositing a sacrificial layer to the top side of a lacey or holey carbon structure or support grid; depositing an Atomic Layer Deposition layer to the bottom side of the sacrificial layer; and removing the sacrificial layer to form a Transmission Electron Microscopy support. |
| 地址 |
Arlington VA US |
