发明名称 DEVICE AND METHODS FOR CONTACTING OBJECTS TO BE TESTED
摘要 The invention relates to a method for positioning a substrate (140) and contacting an object (301) to be tested with a test device having an optical axis (102). The invention also relates to corresponding devices. According to said method, the substrate is applied to a holder (130) and positioned in relation to the optical axis. A contacting unit (150) is also positioned in relation to the optical axis, independently of the positioning process of the substrate. The invention thus ensures that objects to be tested located on the substrate are contacted in a flexible manner.
申请公布号 KR20050075395(A) 申请公布日期 2005.07.20
申请号 KR20057008488 申请日期 2005.05.12
申请人 APPLIED MATERIALS GMBH 发明人 BRUNNER MATTHIAS
分类号 G01R31/28;G01R31/302;G09G3/00;(IPC1-7):G01R31/305 主分类号 G01R31/28
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