摘要 |
PROBLEM TO BE SOLVED: To provide a gas detecting element capable of manufacturing a sensor of simple sensor structure, simple in a manufacturing process, and having a high response speed and high sensitivity, and hydrogen sensor provided with the gas detecting element. SOLUTION: A metal layer containing two kinds or more of metals different in hydrogen storage abilities and hydrogen releasing abilities is provided on a thin film comprising a conductor or a semiconductor provided on a substrate. COPYRIGHT: (C)2007,JPO&INPIT
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