| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultraviolet light emitting device in which an impressing voltage at the time of starting of an excimer lamp can be reduced and deterioration of an optical energy emitting means for irradiating optical energy to discharge gas can be prevented. SOLUTION: The ultraviolet light emitting device is provided with an excimer lamp 1 having a discharge container 10 made of a dielectric material in which a discharge gas is filled in the inner space and a pair of electrodes 13, 14 which are arranged through a dielectric material. The discharge container 1 is formed so that the discharge gap in the inner space may be uneven and an optical energy emitting means 4 for irradiating optical energy to an easy discharge space S<SB>A</SB>in which the discharge gap becomes shortest is provided. COPYRIGHT: (C)2008,JPO&INPIT
|
