发明名称 CUTTING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a cutting method capable of improving processing quality of a workpiece without remarkably changing a device and a facility.SOLUTION: In a cutting method, cutting work of a workpiece (11) is performed using a cutting device (2), which includes: a holding means (12) for holding a workpiece; a cutting means (10) including a spindle having a cutting blade (8) mounted to the tip thereof and for performing cutting work of a workpiece held by the holding means; and a cutting liquid supply means (28) for supplying a cutting liquid to the cutting blade and a workpiece held by the holding means. Cutting work of a workpiece is performed using a chemical containing a fluorine-based solvent as the cutting liquid.SELECTED DRAWING: Figure 2
申请公布号 JP2016197637(A) 申请公布日期 2016.11.24
申请号 JP20150076203 申请日期 2015.04.02
申请人 DISCO ABRASIVE SYST LTD 发明人 NOJO HARUKI;TANAKA KAZUMA;MASUDA TAKATOSHI;MAEMOTO NOZOMI
分类号 H01L21/301;B24B27/06;B24B55/02 主分类号 H01L21/301
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