| 摘要 |
An apparatus for self-diagnosing a DC out relay of a wafer burn-in system is provided to search a broken DC out relay by positioning a connection controller between DC out relays connected with a DC input line and a DC sensing line. An apparatus for self-diagnosing a DC out relay of a wafer burn-in system comprises a plurality of PD unit parts(1 to n), a plurality of DC out relays(1-1 to 1-n), a DC unit, and a connection controller(20-1 to 20-n). The PD unit part outputs an self-diagnosing signal. The plurality of DC out relays is connected with the PD unit part, respectively, and is connected with each other using a DC input line(I) and a DC sensing line(S). The self-diagnosing signal is inputted to the DC unit through the DC out relay, and the DC unit measures a DC parameter of the self-diagnosing signal. The connection controller controls the connection of the DC out relay in the DC input line and the DC sensing line. |
