发明名称 PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a flexible display device having high display quality and high yields.SOLUTION: Laser light 610a and 610b output from an excimer laser device 600 is synthesized by an optical system 630. Laser light 610c that is extended horizontally by the optical system 630 is incident on a lens 670 via a mirror 650 and condensed into a linear beam 610d. A processing region 710 in a processing object 700 is irradiated with the linear beam 610d through a substrate 720. The substrate 720 is provided with a first organic resin layer or a second organic resin layer.SELECTED DRAWING: Figure 6
申请公布号 JP2016189005(A) 申请公布日期 2016.11.04
申请号 JP20160088690 申请日期 2016.04.27
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;ONO MASAKATSU;ADACHI HIROKI;IDOJIRI SATORU;TAKESHIMA KOICHI
分类号 G09F9/00;H01L21/425;H01L21/477;H01L51/50;H05B33/02;H05B33/10 主分类号 G09F9/00
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