AMORPHOUS HYDROCARBON FILM, AND SLIDING MEMBER AND SLIDING SYSTEM PROVIDED WITH SAID FILM

摘要

According to the present invention, a low-friction coating 5 includes: an aliphatic hydrocarbon group that exhibits a peak in a region of 2900-3000 cm-1 in an infrared absorption spectrum; a carbonyl group that exhibits a peak in a region of 1650-1800 cm-1 in an infrared absorption spectrum; an aromatic component (C7H7 +) that exhibits a peak at mass 91.1 in a positive ion spectrum obtained by TOF-SIMS; and a fused ring component (C9H7 +) that exhibits a peak at mass 115.2 in a positive ion spectrum obtained by TOF-SIMS.