发明名称 MONOLITHIC OPTICAL COMPONENTS WITH INTEGRATED FLEXURES
摘要 An optical element includes a monolithic body portion, the monolithic body portion having an inner body portion, an outer body portion extending at least partially around the inner body portion, and exactly three flexural hinges connecting the inner body portion to the outer body portion. One of the inner body portion and the outer body portion defines an optical active portion configured to reflect, refract, or diffract light, and the other of the inner body portion and outer body portion defines a mount portion.
申请公布号 EP2956811(A4) 申请公布日期 2016.11.09
申请号 EP20140751392 申请日期 2014.02.12
申请人 ZYGO CORPORATION 发明人 BREMER, MARK
分类号 G02B7/00;G02B7/182;G02B7/192 主分类号 G02B7/00
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