| 摘要 |
PROBLEM TO BE SOLVED: To provide a stable supply device for a hydrogen peroxide solution which supplies a minute amount such as the flow rate of 5-40 ml/min of comparatively concentrated hydrogen peroxide solution of 10-35 mass% to a bactericide gasification device and minimizes the fluctuation of the flow rate and measurement error due to bubbles (oxygen gas) in a liquid supply piping apt to generate in the minute amount of flow.SOLUTION: A stable supply device for a hydrogen peroxide solution is composed to arrange an air chamber 5 (an air chamber type accumulator with membrane) for restraining pulsation of the discharged hydrogen peroxide solution at the downstream side of a plunger pump 4, to dispose a deaeration module 7 for removing a gas in the above solution at the downstream side of the air chamber 5, to equip a nozzle part having a pressurizing mechanism 9 to spray the hydrogen peroxide solution into a bactericide gasification device 12, and to use a core in order to reduce the change of piping cross section generating at the piping connection part.SELECTED DRAWING: Figure 1 |
