| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a multilayer mirror having a peel ply consisting of a material with small surface roughness at the time of film formation, on a substrate and not lowering its reflectivity compared with a case without the peel ply. <P>SOLUTION: The multilayer mirror of this invention is constituted of multilayered film which keeps layer pairs (4) consisting of two layers with different refractive indexes overlying a substrate (1). The substrate and the layer pairs are interleaved with a single layer film (3) consisting of a material including molybdenum is formed so that the a part of the single layer film is not covered with the layer pair. As an implementation of this invention, the single layer film and the substrate is interleaved with a film (2) consisting of silicon-dioxide. <P>COPYRIGHT: (C)2007,JPO&INPIT |
