| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card for a wafer test capable of a block repair easily and rapidly, the probe card for the wafer test has a simple structure in which a PCB pad and a needle can be connected directly, keeping a stable electric property. SOLUTION: The probe card is used in a probing device for an electric property inspection for the semiconductor wafer; an arrangement of a pattern is carried out on an insulation substrate; the PCB pad forming the first and second penetrating holes which are penetrating the front and rear surfaces is formed; the penetrating hole trench penetrating the front and rear surfaces is formed; a fourth reinforced plate forming an insertion part inserting into the second penetrating hole of the PCB pad is arranged; a probe block in which an needle ash part fixing a plurality of needles is mounted on one side and an insertion part inserting along the first penetrating hole of the PCB pad and the penetrating hole of the fourth reinforced plate is mounted on the other side is arranged; a fifth reinforced plate connecting with the insertion part of the probe block which is inserted along the penetrating hole of the fourth reinforced plate and the penetrating hole of the PCB pad fixing the rear surface of the fourth reinforced plate in freely adhered state is prepared. COPYRIGHT: (C)2008,JPO&INPIT
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