| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a vacuum locking device, wherein a degree of freedom about the arrangement position of a non-evaporation type getter is high, and high vacuum in an airtight vessel can be attained. <P>SOLUTION: Slurry obtained by mixing getter particles with a solvent is applied only to the prescribed portion of a second package substrate (a member for the airtight vessel) 3 composing a part of an airtight package (the airtight vessel)P, the solvent is then evaporated at a prescribed baking temperature and removed to form the non-evaporation type getter 4, the frame part 11 (an airtight vessel element) of a device body 1, a first package substrate 2 (the airtight vessel element), and the second package substrate 3 are then bonded to form the airtight package P, the non-evaporation type getter 4 is then activated at a prescribed activating temperature to obtain an acceleration sensor (the vacuum locking device), and the activating temperature is set higher than the baking temperature, and the activating temperature is set higher than a bonding temperature. <P>COPYRIGHT: (C)2008,JPO&INPIT |
