BRUSHLESS ROTARY PLASMA ELECTRODE STRUCTURE AND FILM COATING SYSTEM

摘要

A brushless rotary plasma electrode structure is disclosed. The brushless rotary plasma electrode structure includes a main body, a plurality of guided portions, and a plurality of conducting-through members. The main body further includes a plurality of electrode portions that have a first salient portion furnished at the periphery thereof. The guided portion is penetrated through the electrode portion. Each of the conducting-through members further includes a second salient portion. There is an internal in both the first salient portion and the second salient portion. In addition, a film coating system is also provided.

主权项

1. A brushless rotary plasma electrode structure, comprising:
A main body being rotating with respect to an axis further comprising a plurality of electrode portions that are disposed at intervals, and the electrode portions have a first salient portion furnished at the periphery thereof; A plurality of guided portions penetrating through those electrode portions; and A plurality of conducting-through members, each of them further comprising a second salient portion having a first interval between thereof and its corresponding the first salient portion.