发明名称 ホルダー、荷電粒子線装置、および真空装置
摘要 PROBLEM TO BE SOLVED: To provide a holder capable of inhibiting drift.SOLUTION: A holder 100 includes: a cylinder 10 having a first opening 12 and a second opening 14; a first shaft part 20 which is disposed at the first opening 12 side and enables linear motion in the cylinder 10; a second shaft part 30 which is disposed at the second opening 14 side and enables rotary motion in the cylinder 10; a conversion part 40 which converts the rotary motion of the second shaft part 30 into the liner motion to transmit the linear motion to the first shaft part 20; a holding part 50 which is provided at the first shaft part 20 and may hold an object; and a seal part 60 which hermetically seals a space between the second shaft part 30 and the cylinder 10.
申请公布号 JP6009980(B2) 申请公布日期 2016.10.19
申请号 JP20130068616 申请日期 2013.03.28
申请人 日本電子株式会社 发明人 湯浅 修一
分类号 H01J37/20 主分类号 H01J37/20
代理机构 代理人
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