发明名称 PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a processing device that can achieve high productivity.SOLUTION: The processing device comprises a chuck table (20), processing means (10), a cassette placement area (12) on which are placed cassettes (14a and 14b) for storing a plurality of work-pieces (11), conveying means (28) which conveys the work-pieces among the cassettes, a temporary placement area (24), and the chuck table, and control means (64) which controls each constituting element. Before last processing for a first work-piece which is processed lastly of first work-pieces stored in the first cassette (14a) is finished, a first-second work-piece which is processed first of second work-pieces stored in the second cassette (14a) is temporarily placed in the temporary placement area. After the processing for the last-first work-piece is completed, the last-first work-piece held in the chuck table is carried out from the chuck table, and the first-second work-piece temporarily placed in the temporary placement area is carried into the chuck table.SELECTED DRAWING: Figure 1
申请公布号 JP2016203362(A) 申请公布日期 2016.12.08
申请号 JP20150092079 申请日期 2015.04.28
申请人 DISCO ABRASIVE SYST LTD 发明人 TOKUMITSU NAOYA;DEJIMA NOBUKAZU;MIYAZAKI JUNICHI
分类号 B24B41/06;H01L21/301 主分类号 B24B41/06
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