LARGE CURRENT TYPE ION IMPLANTING DEVICE AND ION IMPLANTING METHOD USING IMPLANTING DEVICE,申请号KR19970002917-传众专利搜索

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发明名称	LARGE CURRENT TYPE ION IMPLANTING DEVICE AND ION IMPLANTING METHOD USING IMPLANTING DEVICE
摘要
申请公布号	KR100491471(B1)	申请公布日期	2005.08.04
申请号	KR19970002917	申请日期	1997.01.31
申请人		发明人
分类号	H01L21/265;(IPC1-7):H01L21/265	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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