| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope system that derives the intensity distribution of illumination light that suits for observing the image of an object under observation in a best state and does image formation.SOLUTION: The microscope system comprises: an illumination light source for irradiating a test object with illumination light; an image formation optical system for forming the image of the transmitted or reflected light of the test object; an illumination optical system having a first spatial light modulation element for causing the intensity distribution of illumination light at the conjugate position of pupils of the image formation optical system to change, and irradiating the test object with light from the illumination light source; an image sensor for detecting light routed via the image formation optical system; and a calculation unit for comparing, each time the intensity distribution of illumination light is changed by the first spatial light modulation element, the output data detected by the image sensor after the intensity distribution of illumination light is changed with the output data detected by the image sensor before the intensity distribution of illumination light is changed, and successively finding the intensity distribution of illumination light suitable for the observation of the test object.SELECTED DRAWING: Figure 1 |
