| 摘要 |
A wafer transfer apparatus for a semiconductor fabrication is provided to safely load/unload a wafer using a position detection unit even if a carrying state of the wafer in a wafer carrier is abnormal. An wafer transfer apparatus(200) for a semiconductor fabrication includes a robot arm(210), an operation unit(220) and a position detection unit(230). The robot arm loads/unloads a wafer(W) which is carried by a wafer carrier(100). The operation unit is coupled with the robot arm so that the operation unit operates the robot arm. The position detection unit is installed at the robot arm so that the carrying position of the wafer which is carried by the wafer carrier is detected. The position detection unit is installed at an end of the robot arm. Each position detection unit is installed at both sides of the robot arm in order to detect a slope of the wafer.
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