发明名称 |
System for transporting substrate carriers |
摘要 |
<p>In a semiconductor fabrication facility, a conveyor (12) transports substrates carriers (14). The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism (32) lifts the substrate carriers (14) from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.</p> |
申请公布号 |
EP2019417(A1) |
申请公布日期 |
2009.01.28 |
申请号 |
EP20080018060 |
申请日期 |
2003.08.29 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
RICE, MICHAEL R.;HUDGENS, JEFFREY C.;ENGLHARDT, ERIC A.;LOWRANCE, ROBERT B.;ELLIOTT, MARTIN R. |
分类号 |
B65G49/06;H01L21/00;B65G49/07;H01L21/677;H01L21/68 |
主分类号 |
B65G49/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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