| 摘要 |
PROBLEM TO BE SOLVED: To facilitate switching from planar discharge to tubular discharge in a plasma light source where a magnetic field (magnetic bottle) for confining plasma is formed by switching planar discharge to tubular discharge between a pair of coaxial electrodes.SOLUTION: The plasma light source includes first and second coaxial electrodes 10, 10' disposed to face each other, a chamber 20 for holding a plasma medium in the first and second coaxial electrodes 10, 10' at a temperature and a pressure suitable for plasma generation, and a voltage application device 30 for applying discharge voltages having inverted polarities to the first and second coaxial electrodes 10, 10'. The plasma light source confines plasma in the axial direction by forming tubular discharge between the first and second coaxial electrodes 10, 10', and the second coaxial electrode 10' is in electrically floating state for the first coaxial electrode 10. |
