发明名称 半導体コンタクト構造及びその形成方法
摘要 The present invention addresses the problem of providing a semiconductor contact structure and method for forming the same whereby a satisfactory ohmic or rectifying junction can be provided to a semiconductor substrate. A semiconductor contact structure and a method for creating the same, characterized in that a thin film of a metal silicon compound in which the compositional ratio of a transition metal (M) and silicon is in the range of 1:n (7 <= n <= 16) is fabricated on a surface of a semiconductor substrate.
申请公布号 JP6044907(B2) 申请公布日期 2016.12.14
申请号 JP20140503769 申请日期 2013.02.25
申请人 国立研究開発法人産業技術総合研究所 发明人 内田 紀行;金山 敏彦;岡田 直也
分类号 H01L21/28;H01L21/336;H01L29/78;H01L29/82 主分类号 H01L21/28
代理机构 代理人
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