发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device, etc. which can suppress a poor contact between a source and a drain electrode and a semiconductor film. SOLUTION: The semiconductor film 30 is formed which is thicker at both ends 30s and 30d than in a flat portion 30c. Then, a gate insulating film 40 is so formed that both ends 30s and 30d may be exposed. At both ends 30s and 30d, intermediate electrodes 50s and 50d for connecting the source and drain electrodes 60s and 60d to the source and drain regions are formed. Then, an interlayer insulating film 50 is so formed as to cover the intermediate electrodes 50s and 50d, and contact holes reaching the intermediate electrodes 50s and 50d are formed in the interlayer insulating film 50. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006228830(A) 申请公布日期 2006.08.31
申请号 JP20050038207 申请日期 2005.02.15
申请人 SEIKO EPSON CORP 发明人 YUDASAKA KAZUO
分类号 H01L29/786;H01L21/336 主分类号 H01L29/786
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