| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-accuracy model parameter extraction system capable of extracting a parasitic component of an aluminum wire or a PAD certainly included in model parameter-extracting characteristic measurement data with high accuracy regardless of a person in a short time, and reducing characteristic measurement man-hours. SOLUTION: By a back annotation system in S201, the parasitic component of the aluminum wire or the PAD is extracted (S204), and a net list with parasitic components is produced (S205). Because a pure DC parameter and a pure capacity parameter wherein the parasitic component of semiconductor element for extracting model parameter is eliminated can be extracted with high accuracy by extracting a model parameter by use of each piece of the characteristic measurement data of a DC and capacity, and the net list with parasitic components extracted with high accuracy, the model parameter for the high-accuracy circuit simulation can be provided. COPYRIGHT: (C)2006,JPO&NCIPI
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