| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas sensor capable of detecting the concentration of a gas, with high sensitivity. SOLUTION: The gas sensor is equipped with a quartz substrate 11, the IDT electrode 13 formed on the surface of the quartz substrate 11 and having a large number of crossing digital electrodes 12a and 12b, the hydrogen reacting catalyst film 14 formed to the quartz substrate 11 and made to react with a gas to generate heat, a pair of the reflectors 15 arranged on both sides of the IDT electrode 13 along the propagation direction of the surface acoustic wave excited by the IDT electrode 13, and an oscillation circuit for exciting the IDT electrode 13. The hydrogen reacting catalyst film 14 is formed of the propagation passage of the surface acoustic wave, excited by the IDT electrode 13 and the change in the temperature of the quartz substrate 11, due to the generation of heat of the hydrogen reacting catalyst film 14 is detected as a frequency signal. COPYRIGHT: (C)2008,JPO&INPIT
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