| 摘要 |
PROBLEM TO BE SOLVED: To perform stable measurement by reducing the occurrence of erroneous measurement or measurement failure owing to dispersion, etc. in a measurement image. SOLUTION: A plurality of different template images 17a, 19a, and 20a are previously registered to match the measurement image 21 to the respective template images 17a, 19a, and 20a in order. An image is determined to be a coincidence image, in which a criterion selected from among a plurality of different criteria, such as a matching score value, exceeds a threshold and is the largest. Based on this coincidence image, a measuring position is found to perform measurement. COPYRIGHT: (C)2008,JPO&INPIT
|
