| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor testing apparatus capable of reducing the footprint of the semiconductor testing apparatus inside a semiconductor clean area, and thereby, reducing installation cost and device testing cost and time that accompany installation. SOLUTION: The semiconductor testing apparatus is provided with a first main frame 12A, arranged in a clean room and having a function other than those of a pattern generation section and a fail determination section 122; a second main frame 12B arranged outside the clean room and having the pattern generation section and the determination section 122; and a digital transmission line 132 of high-speed and low loss for performing signal transmission between a test head 11 and the first and second main frames 12A, 12B. COPYRIGHT: (C)2008,JPO&INPIT
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