| 摘要 |
PROBLEM TO BE SOLVED: To provide a useful flatness measuring apparatus which improves accuracy and operationality in a measurement and lessens limits for measurement objects, while utilizing a liquid level as a basis plane being a baseline of the measurement. SOLUTION: The flatness measuring apparatus comprises: a flatness measuring apparatus main body which moves freely along a surface to be measured; and a liquid tank for forming a basis liquid level which is a quasi-ideal plane, independently of the flatness measuring apparatus main body. A copying means which mechanically copies the surface to be measured, and an optical displacement sensor which measures a vertical movement with respect to the basis liquid level, are attached to the flatness measuring apparatus main body so as to be movable vertically. The flatness of the surface to be measured is characteristically measured by measuring a difference between the basis liquid level and the surface to be measured. COPYRIGHT: (C)2008,JPO&INPIT
|
