摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an element assembly which integrates circuit elements such as a capacitor, resistor, and inductor, and is manufactured easily and inexpensively. <P>SOLUTION: A plurality of recessed parts 25 are provided on an upper surface of a substrate 22. In some recessed parts, a flat plate like fixed electrode 30 on a bottom surface of the recessed part 25 and a flat plate like movable electrode 31 oppositely arranged on a rear surface of a cover part 23 are provided to form a variable capacitor 27. In other recessed parts, a fixed electrode 33 on a bottom surface of the recessed part 25 and a movable electrode 34 oppositely arranged on the rear surface of the cover part 23 are provided, and a high resistance resistor 35 is arranged between both of the electrodes to form a variable resistor 28. In still other recessed parts, a flat plate like fixed electrode 36 is provided on a bottom surface of the recessed part 25, and a zigzag meandering movable electrode 37 is oppositely arranged on the rear surface of the cover part 23 to form a variable inductor 29. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |