| 摘要 |
Disclosed are a multi-functional sensor apparatus capable of providing a plurality of functions by implementing two or more sensors on the same substrate using a batch semiconductor process, and a manufacturing method thereof to reduce manufacturing costs. The multi-functional sensor apparatus comprises two or more sensors formed in areas of the substrate which are two-dimensionally divided by the batch semiconductor process on the same substrate. The sensors are divided into two or more sensors in accordance with a function. |
