WIRE GRID POLARIZER AND METHOD FOR FABRICATING THE SAME

摘要

Provided are a wire grid polarizer and a method for fabricating the same. The method for fabricating a wire grid polarizer comprises the steps of: forming a conductive layer on a substrate; forming a guide layer on the conductive layer; forming a hard mask pattern on the guide layer to partially expose the guide layer; forming a guide pattern to partially expose the conductive layer by patterning the guide layer using the hard mark pattern as an etching mask; providing a block copolymer of two monomers having different etching rates in a space defined by the conductive layer and the guide pattern; forming two monomer blocks by aligning the block copolymer of the two monomers; selectively removing one of the two monomer blocks; and forming a conductive wire pattern by patterning the conductive layer using the remaining monomer block and the guide pattern as etching masks. The width of the upper end of the guide pattern adjacent to the hard mask pattern is smaller than the width of the lower end adjacent to the conductive layer. The width of the upper end of the guide pattern is smaller than the width of the hard mask pattern. The method of the present invention can improve the yield of the wire grid polarizer.