| 发明名称 |
METHODS OF GROWING THIN FILMS AT LOW TEMPERATURES USING ELECTRON STIMULATED DESORPTION (ESD) |
| 摘要 |
The invention includes a method of promoting thin film growth on a solid substrate, wherein derivatization of the substrate comprises formation of at least one surface species. In certain embodiments, the method comprises desorbing the surface species from the substrate using electron stimulated desorption (ESD). |
| 申请公布号 |
US2016218004(A1) |
申请公布日期 |
2016.07.28 |
| 申请号 |
US201415024269 |
申请日期 |
2014.09.22 |
| 申请人 |
THE REGENTS OF THE UNIVERSITY OF COLORADO, A BODY CORPORATE |
发明人 |
GEORGE Steven M.;CAVANAGH Andrew S. |
| 分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of promoting thin film growth on a solid substrate, wherein the method comprises:
(a) submitting the solid substrate to electron stimulated desorption (ESD) to desorb a surface species, thus generating at least one active site on the substrate. |
| 地址 |
Denver CO US |
