| 发明名称 |
SEMICONDUCTOR SYSTEM ASSEMBLIES AND METHODS OF OPERATION |
| 摘要 |
An exemplary semiconductor processing system may include a remote plasma source coupled with a processing chamber having a top plate. An inlet assembly may be used to couple the remote plasma source with the top plate and may include a mounting assembly, which in embodiments may include at least two components. The inlet assembly may further include a precursor distribution assembly defining a plurality of distribution channels fluidly coupled with an injection port. |
| 申请公布号 |
US2016217981(A1) |
申请公布日期 |
2016.07.28 |
| 申请号 |
US201615068811 |
申请日期 |
2016.03.14 |
| 申请人 |
Applied Materials, Inc. |
发明人 |
Nguyen Andrew;Ramaswamy Kartik;Nemani Srinivas;Howard Bradley;Vishwanath Yogananda Sarode |
| 分类号 |
H01J37/32;H01L21/67 |
主分类号 |
H01J37/32 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A semiconductor processing system comprising:
an inlet assembly comprising:
a precursor distribution assembly defining a plurality of distribution channels fluidly coupled with an injection port, anda mounting assembly comprising a gas block coupled upstream with the precursor distribution assembly, and a mounting block coupled downstream with the precursor distribution assembly. |
| 地址 |
Santa Clara CA US |
