发明名称 PROTECTIVE FILM FORMING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a method capable of forming a protective film except a surface of an electrode terminal on an organic electroluminescent element using a roll-to-roll method.SOLUTION: A protective film forming method comprises the steps of: transferring a long belt-like base material 9 in which a plurality of organic electroluminescent elements 12 including electrode terminals 121a and 122a are provided side by side in a length direction to a film forming area in which an evaporation device 5 is arranged; and forming a protective film by discharging an evaporated protective film forming material toward a surface of the organic electroluminescent element 12 in the film forming area. A shielding member 6 moving at the same speed as a transfer speed of the base material is discharged toward the surface of the organic electroluminescent element 12 while being brought into contact with surfaces of the electrode terminals 121a and 122a.SELECTED DRAWING: Figure 10
申请公布号 JP2016197579(A) 申请公布日期 2016.11.24
申请号 JP20150077880 申请日期 2015.04.06
申请人 NITTO DENKO CORP 发明人 YAMADA YASUYOSHI
分类号 H05B33/10;C23C14/24;H01L51/50;H05B33/04;H05B33/06 主分类号 H05B33/10
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