发明名称 |
EVAPORATOR BOAT FOR A DEVICE FOR COATING SUBSTRATES |
摘要 |
The invention relates to an evaporator boat for a device for coating substrates in a vacuum coating chamber, which can be heated by direct current passage and has a convexly curved evaporation surface. |
申请公布号 |
WO2006133779(A2) |
申请公布日期 |
2006.12.21 |
申请号 |
WO2006EP04430 |
申请日期 |
2006.05.11 |
申请人 |
LEYBOLD OPTICS GMBH;BRAUN, UWE |
发明人 |
BRAUN, UWE |
分类号 |
C23C14/26 |
主分类号 |
C23C14/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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