发明名称 PLANAR HEATER
摘要 <p>Provided is a planar heater having a substantially uniform heating temperature with a carbon wire heat generating body. The inner region and the outer region have different in-plane arrangement densities of carbon wire heat generating bodies (CW). A power supply terminal section having a connecting line for carrying electricity to a heat generating body (CW) is arranged at the center portion on the rear side of a silica glass board-like body. The connecting wire of the inner carbon wire heat generating body is connected at the center portion of the silica glass board-like body, the connecting lines (3a, 3b) of the outer carbon wire heat generating body are extended to the outer regions from the center portion of the silica glass board-like body, without crossing the inner carbon wire heat generating body (CW), and are connected with the outer carbon wire heat generating body (CW).</p>
申请公布号 WO2007097193(A1) 申请公布日期 2007.08.30
申请号 WO2007JP52081 申请日期 2007.02.07
申请人 COVALENT MATERIALS CORPORATION;TOKYO ELECTRON LIMITED;SHIBATA, KAZUO;KAWASAKI, HIROO;IWATA, TERUO;AMIKURA, MANABU 发明人 SHIBATA, KAZUO;KAWASAKI, HIROO;IWATA, TERUO;AMIKURA, MANABU
分类号 H05B3/86;H05B3/14;H05B3/74 主分类号 H05B3/86
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