PROCESS FOR CONTINUOUSLY PRODUCING MONOSILANE

摘要

A process for easily and efficiently producing monosilane, which is industrially significantly useful. The process is characterized by using a monosilane production apparatus comprising a reaction column, two or more upper-plate condensers which are serially connected to a top part of the reaction column and have a reflux liquid feed pipe attached thereto, a reboiler for a bottom part of the reaction column, and an evaporation tank connected to the bottom of the reaction column. It is further characterized by: feeding at least one of trichlorosilane and dichlorosilane to a middle-plate part of the reaction column; feeding at least one of an amine substituted by a tertiary aliphatic hydrocarbon and the hydrochloride of an amine substituted by a tertiary aliphatic hydrocarbon as a catalyst to an upper-plate part of the reaction column; introducing a reaction-product mixture comprising monosilane, monochlorosilane, dichlorosilane, and trichlorosilane discharged from the top of the reaction column into the upper-plate condensers; separating the monosilane from a condensate comprising the monochlorosilane, dichlorosilane, and trichlorosilane with the upper-plate condensers at a temperature of 50 to -50°C; returning the separated condensate to an upper-plate part of the reaction column through the reflux liquid feed pipe to bring it into contact with the catalyst in the reaction column; discharging a bottom recovery liquid comprising the tetrachlorosilane and the catalyst from the bottom of the reaction column; introducing it into the evaporation tank; and returning the catalyst recovered from the bottom of the evaporation tank to the reaction column.