发明名称 PLANARIZING PROBE CARD
摘要 <p>A novel planarizing probe card (110) for testing a semiconductor device is presented. The probe card is adapted to come into. contact with a probe card mount (107) that is in adjustable contact with the prober. The probe card includes a printed circuit board (130) affixed to a stiffener (135) and a probe head (115) that is in electrical contact with the printed circuit board The probe head also includes a plurality of probe contactor tips (120) that define a first plane (152). The stiffener further contains at least two planarizing adjusters (137) that comes into contact with the probe card mount The adjusters may be actuated to alter the position of first plane. A surface of the semiconductor device under test (105) may define a second plane, and the adjusters may be adjusted to position the first plane to be substantially parallel to the second plane.</p>
申请公布号 WO2009075681(A1) 申请公布日期 2009.06.18
申请号 WO2007US87173 申请日期 2007.12.12
申请人 TOUCHDOWN TECHNOLOGIES, INC. 发明人 KARKLIN, KEN;GARABEDIAN, RAFFI
分类号 G01R31/28 主分类号 G01R31/28
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